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Performance Enhancements of a High Precision Scanning Stage

Jing-Chung Shen and Chi-Huang Hwang
Department of Automation Engineering, National Formosa University, Winlin, Huwei, Taiwan
Abstract—Recently, a two dimensional high precision scanning stage was developed at the Department of Automation Engineering, National Formosa University, Taiwan. This stage is composed by two stages, a two-degrees-of-freedom (DOF) (X and Y) linear cross roller guide way supported stage and a 4-DOF (Z, θx, θy and θz) piezo-stage. Two linear shaft voice coil motor are used to actuate the roller guided X-Y stage and five piezoelectric actuators are used in the piezo-stage. The working range of the stage is 25 mm × 25 mm. The piezo-stage is used to compensate the vertical position, row, pitch and yow errors throughout the whole working range. In this note, the control systems of this stage are presented. In order not to stimulate the eigenfrequencies of the stage, a fourth order track planning method is used to derive the command curve for motion control. Moreover, a friction model based feedforward controller is added to compensate the effect of friction. Experimental results are presented to show the performance of this stage.

Index Terms—precision scanning stage, piezoelectric, six-degrees-of-freedom, voice coil motor, track planning, friction compensation

Cite: Jing-Chung Shen and Chi-Huang Hwang, "Performance Enhancements of a High Precision Scanning Stage," Jounal of Automation and Control Engineering, Vol. 4, No. 5, pp. 360-364, October, 2016. doi: 10.18178/joace.4.5.360-364
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